Business
Getting all the sensor data you need
SCM™ is a consolidated management framework SW, which, directly and in-situ displays sensor and FDC value in one frame, analyzes them and feedbacks to equipment or upload to FDC sever. Variety of external sensors like optic and electrical plug in to SCM, so that, most beneficial thing using it is to be compared different type of signals in one picture, making easy analysis. It’s so called “Tool Box” as well. We are sure that it could lead an innovation and productivity on equipment and FDC technology for equipment suppliers as well as chip makers in terms of developing next generation equipment and maintaining it in production line.
Toolbox Advantages
- Integration of sensor data into existing SECS / HSMS data stream
- No influence of equipment process
- Host can access sensor data like any other tool data
- All of sensor data can analyze with tool data
- Provides high speed auxiliary data interface to AEC/APC Systems, such as MVA systems
Toolbox Characteristics
- Consolidated OperationUsers can easily access and handle the multi sensor data at Toolbox S/W Frame
- Health Index ManagementWith few clicks, HIM is able to help to solve issues of bad wafer or parameters , analyzing a large amount of data on which and how parameter will effect.
Toolbox Supported Sensors
- VI Prove : RF plasma sensor - AE, Plasmart, ASE, Birds
- OES : Optical emission spectrometer - Ocean Optics, KSP, Photon, Avantes
- SPOES : Residual gas analyzer & Cleanning Optimization - MITS, Imagineering
- QMS-RGA : Quantitative mass spectrometry - EL
- Plasma Sensor : Plasma Status Monitoring - P&A Solution, Imagineering
Toolbox Application
| Type | Description | Available Sensor | Results |
|---|---|---|---|
| Chamber Recovery | After PM, Parts Installation Status | VI Probe | HW Recovery |
| Seasoning Optimize | OES/SPOES, VI probe | Process Recovery | |
| MTBC | ISD Cleaning optimize | OES,SPOES | Productivity |
| Parts Worn Out | VI probe | Productivity | |
| FD/FDC & EQ/Process Diagnose |
Insitu-Leak detection | OES,SPOES | Detect abnormal status |
| Process Health Index | EQ Data, OES/SPOES, VI Probe | Detect abnormal status |
Toolbox Development Load Map
