General Description

We supply Process Parts in Dry Etch & PECVD to End User in Domestic & Foreign Sites. Upper Electrode, Bottom Electrode in Dry Etch & Susceptor, Diffuser, Backing Plate, Shadow Frame in PECVD Through New and Re-work work, We do our best for customer satisfaction.

Main Parts Items

CVD
Suceptor	Diffuser
Shadow Frame	Shower Plate

Etch
Upper Electrode	Bottom Electrode

The Merits of Our Products

Sub Products List

CVD (Golf Tee, Roller Bushing, Align Pin, Sapphire View Port, Etc)
Golf Tee
Sapphire	Etc

Etch (Shield Ring Normal & Hybrid Type, Shield Lower, Focus Ring, Gas Nozzle, Etc)
Shield Ring	Gas Nozzle

The Merits of Sub Products

ETC.

• 8G : Can support up to 8 Generation
• Can Support Customer Requirement : Including Roughness, Support Customer VOC