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Technical Info
Sensor Recommendation
Technical Information
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Technical Info
> Sensor Recommendation
Sensor Recommendation
LoadLock
Sensor Type
Description
Available Sensor
Vision system
Wafer Lifting Problem detection
PrimeSolution
Shower Head
Sensor Type
Description
Available Sensor
IEP
Real time Thickness monitoring
PrimeSolution
Between Matcher & Cathode
Sensor Type
Description
Available Sensor
Vi Probe
V,I,Phase / Impedance monitoring during process
Z-scan
Birds
ASE
Impedant
ViewPort
Sensor Type
Description
Available Sensor
OES
EPD & cleaning optimization
KSP
OceanOptics
Avantes
Hi Speed Optic
Harmonic extraction & analysis
High resolution Periodic sampling (lazer monitoring)
PrimeSolution
SROES
Spatial resolution OES
KSP
Plasma
Plasma Status monitoring
P&A solution Imagineering
Foreline
Sensor Type
Description
Available Sensor
SPOES
Fore line gas analysis
MITS
QMS-RGA
Gas analysis
EL
PUMP
Sensor Type
Description
Available Sensor
Vibration
Monitoring Vibration (Pump)
PrimeSolution
> Technical Info > Sensor Recommendation
> Technical Info > Sensor Recommendation