PSFM™

A solution for real time monitoring the data generated by fab manufacturing equipment This enables equipment operators and factory managers to decrease down-time for product manufacturing tools.Factories benefit from reduced wafer scrap and a reduced need to run non-product wafers to monitor tool performance.Wide data acquisition environment - PSFM™ links to almost all types of fab equipment based on SECS/HSMS or other custom interface Statistical analysis capabilities - PSFM™ is capable of performance basic statistical analysis functions for signal transformation and summarization, Dedicated centralized database - Based on industry-standard high-performance Oracle technology, PSFM™ provides data management solutions fitted Reporting capabilities - PSFM™ enables centralized configuration of user GUI to provide operators and managers with view of factory tool performance. PSFM™ develops hardware and software solutions which integrate sensors to acquire data on process parameters and analyze the data collected to

PSFM™ Function View

• Whole-FAB View & Central Management
• Reference & OCAP Management
• MPS(Machine Performance Status) View
• Pareto Analysis Chart

• EQ / Chamber / Lot / Wafer Current Status View
• Management Access Authorization
• Multi-EQ / Multi-Chamber Analysis
• Alarm Status View

• Data Analysis-UVA & MVAt
• Variable Data Plotting
• Reference Management
• User friendly Interface
• Adaptive Model Generation and Monitoring

• Statistic Analysis Chart
• Contribution Value Chart
• Easy Filtering Option Function
• Auto Report – Daily, Weekly,,,
• Auto Macro Report-Raw Data View