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센서타입
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센서타입
LoadLock
Sensor Type
Description
Available Sensor
Vision system
Wafer Lifting Problem detection
PrimeSolution
Shower Head
Sensor Type
Description
Available Sensor
IEP
Real time Thickness monitoring
PrimeSolution
Between Matcher & Cathode
Sensor Type
Description
Available Sensor
Vi Probe
V,I,Phase / Impedance monitoring during process
Z-scan
Birds
ASE
Impedant
ViewPort
Sensor Type
Description
Available Sensor
OES
EPD & cleaning optimization
KSP
OceanOptics
Avantes
Hi Speed Optic
Harmonic extraction & analysis
High resolution Periodic sampling (lazer monitoring)
PrimeSolution
SROES
Spatial resolution OES
KSP
Plasma
Plasma Status monitoring
P&A solution Imagineering
Foreline
Sensor Type
Description
Available Sensor
SPOES
Fore line gas analysis
MITS
QMS-RGA
Gas analysis
EL
PUMP
Sensor Type
Description
Available Sensor
Vibration
Monitoring Vibration (Pump)
PrimeSolution
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